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Piezoelectric deformable mirror driven by unimorph actuator arrays on multi-spatial layers
Optics Express
|May 9, 2023
Summary
This study introduces a cost-effective piezoelectric deformable mirror (DM) using multi-spatial layer unimorph actuators. The novel design achieves significant wavefront deformation, enabling accurate aberration correction for improved optical system performance.
Area of Science:
- Optics and Photonics
- Materials Science
- Mechanical Engineering
Background:
- Deformable mirrors (DM) are crucial for aberration correction in optical systems.
- Conventional piezoelectric DMs can be expensive due to actuator density limitations.
- Unimorph actuators offer a potential solution for cost reduction and increased actuator density.
Purpose of the Study:
- To propose and develop a low-cost piezoelectric deformable mirror (DM) using multi-spatial layer unimorph actuator arrays.
- To investigate the performance of the proposed DM in terms of wavefront deformation and aberration correction capabilities.
Main Methods:
- A novel piezoelectric DM design utilizing unimorph actuators arranged in multi-spatial layers was conceptualized.
- A prototype DM featuring 19 unimorph actuators across three spatial layers was fabricated.
- The wavefront deformation capability, accuracy in reconstructing Zernike polynomials, and surface flatness were experimentally evaluated.
- The DM's performance in correcting aberrations within an adaptive optics testing system was assessed.
Main Results:
- The developed DM prototype with 19 unimorph actuators demonstrated a wavefront deformation of up to 11 µm at 50 V.
- The mirror achieved a high degree of flatness, with residual surface error of 0.058 µm RMS.
- The DM accurately reconstructed low-order Zernike polynomial shapes.
- Correction of aberrations in an adaptive optics system resulted in a focal spot closely resembling the ideal Airy spot.
Conclusions:
- The proposed multi-spatial layer unimorph actuator array design significantly enhances actuator density, leading to a cost-effective piezoelectric deformable mirror.
- The developed DM prototype exhibits excellent wavefront control capabilities, accurately correcting aberrations and improving optical system performance.
- This technology holds promise for applications requiring high-performance, low-cost adaptive optics solutions.
