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    This study introduces a new method for integrating metasurfaces with silicon-on-insulator chips using narrow waveguides. This approach enhances light extraction and device stability for applications like metalenses.

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    Area of Science:

    • Photonics
    • Metamaterials
    • Silicon Photonics

    Background:

    • Metasurfaces and silicon-on-insulator (SOI) chips offer unique light-shaping capabilities in compact, CMOS-compatible devices.
    • Current methods for vertical light extraction from metasurfaces use wide waveguides, which are susceptible to mode distortion due to multi-modal characteristics.

    Purpose of the Study:

    • To propose and demonstrate a novel approach for metasurface-SOI chip integration using an array of narrow, single-mode waveguides.
    • To overcome the limitations of wide waveguides in facilitating efficient and stable light extraction.

    Main Methods:

    • Numerical simulation and design of two example devices: a beam deflector and a light-focusing metalens.
    • Utilizing an array of narrow, single-mode waveguides for vertical light extraction from the metasurface.
    • Investigating the tolerance of the proposed method to nano-scatterers with high scattering efficiency, such as Si nanopillars.

    Main Results:

    • Demonstrated a beam deflector that redirects light consistently, irrespective of the input direction.
    • Showcased a light-focusing metalens integrated with the SOI chip.
    • Validated the robustness of the narrow waveguide approach against scattering effects.

    Conclusions:

    • The proposed metasurface-SOI integration using narrow waveguides offers a straightforward and effective method for off-chip light shaping.
    • This technique is suitable for compact metasurfaces and has potential applications in metalens arrays and neural probes.
    • The approach enhances device stability and compatibility with CMOS production.