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A monolithically integrated microcantilever biosensor based on partially depleted SOI CMOS technology.

Yi Liu1, Yuan Tian1, Cong Lin1

  • 1School of Integrated Circuits, Peking University, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Beijing, 100871 China.

Microsystems & Nanoengineering
|May 19, 2023
PubMed
Summary

This study introduces a novel integrated aptasensor using piezoresistive microcantilevers and on-chip circuits for sensitive biomolecule detection. The device achieved a low limit of detection for human IgG, abrin, and staphylococcus enterotoxin B (SEB).

Keywords:
BiosensorsElectrical and electronic engineering

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Area of Science:

  • Nanoscience and Nanotechnology
  • Biosensors and Bioelectronics
  • Integrated Circuits and MEMS

Background:

  • Existing biosensing technologies often require complex external circuitry and lack miniaturization.
  • The development of highly sensitive, integrated platforms is crucial for advanced biomolecule detection.
  • Silicon-on-insulator (SOI) CMOS technology offers advantages for integrated micro-electromechanical systems (MEMS) due to its electrical properties.

Purpose of the Study:

  • To present a monolithically integrated aptasensor combining a piezoresistive microcantilever array with an on-chip signal processing circuit.
  • To demonstrate high-sensitivity detection of various biomolecules using the integrated aptasensor.
  • To validate the performance of the integrated system for multichannel biomolecule detection.

Main Methods:

  • Fabrication of a microcantilever array with embedded piezoresistors on a partially depleted (PD) SOI wafer using CMOS technology and micromachining.
  • Integration of an on-chip signal processing circuit including a multiplexer, amplifier, filter, and analog-to-digital converter.
  • Functionalization of microcantilevers for specific biomolecule capture and detection, including the biotin-avidin system.

Main Results:

  • Achieved a deflection sensitivity of 0.98 × 10-6 nm-1 and low output voltage fluctuation (< 1 μV) for the microcantilever.
  • The on-chip circuit demonstrated a maximum gain of 134.97 and a low input offset current of 0.623 nA.
  • Detected human IgG, abrin, and staphylococcus enterotoxin B (SEB) with a limit of detection (LOD) as low as 48 pg/mL.

Conclusions:

  • The monolithically integrated aptasensor design meets the requirements for high-sensitivity biomolecule detection.
  • The use of PD-SOI CMOS technology enhances the performance of the integrated microcantilever sensor.
  • The demonstrated multichannel detection capability highlights the potential for complex biological assays.