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Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing.

Sumanta Kumar Sahoo1, Ravi Bolagam1, Kripasindhu Sardar1

  • 1Department of Materials Science and Engineering, National Cheng Kung University, Tainan 70101, Taiwan.

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Summary

A novel green process uses submerged plasma to directly pattern diamond-like carbon (DLC) onto silicon. This environmentally friendly technique offers a sustainable method for creating DLC patterns for advanced applications.

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Area of Science:

  • Materials Science
  • Surface Chemistry
  • Nanotechnology

Background:

  • Direct patterning of carbon materials is crucial for advanced electronics.
  • Existing methods often involve harsh chemicals or high temperatures.
  • Developing environmentally benign and efficient patterning techniques is essential.

Purpose of the Study:

  • To develop a novel, green, and sustainable method for direct patterning of diamond-like carbon (DLC) on silicon substrates.
  • To investigate the physical and chemical properties of the patterned DLC.
  • To evaluate the potential of the patterned DLC for electrochemical applications.

Main Methods:

  • Submerged plasma-assisted discharge using an ultrasharp tungsten tip to activate ethanol.
  • Anodic patterning of decomposed ethanol molecules onto a silicon substrate under ambient conditions.
  • Characterization using profilometry, AFM, SEM, TEM, FTIR, Raman, XPS, and nanoindentation.

Main Results:

  • Successful direct patterning of DLC onto silicon in ambient conditions using a low-energy plasma process.
  • DLC patterns exhibited tunable sp2-sp3 ratios, with increasing sp3 content correlating to higher Young's modulus (68.5 GPa) and hardness (2.8 GPa).
  • Achieved a maximum areal specific capacitance of 205.5 μF/cm² at 5 mV/s, indicating potential for electrode fabrication.

Conclusions:

  • The submerged plasma-assisted discharge offers a one-step, green, and rapid method for DLC patterning.
  • The process is suitable for fabricating carbon-based electrodes with tunable properties.
  • This sustainable approach holds promise for various microelectronic and energy storage applications.