Silicon bowtie structure based adjustable nonrigid all-nonmetal metamaterial terahertz filter

An all-nonmetal metamaterial (ANM) terahertz device with a silicon bowtie structure has been developed, which has comparable efficiency to that of its metallic counterparts, and better compatibility with modern semiconductor fabrication processes. Moreover, a highly tunable ANM with the same structure was successfully fabricated through integration with a flexible substrate, which demonstrated large tunability over a wide frequency range. Such a device can be used in terahertz systems for numerous applications, and is a promising substitute for conventional metal-based structures.