Millimeter-scale ultrathin suspended metasurface integrated high-finesse optomechanical cavity

A typical optomechanical system is a cavity with one movable mirror and one fixed mirror. However, this configuration has been considered incapable of integrating sensitive mechanical elements while maintaining high cavity finesse. Although the membrane-in-the-middle solution seems to be able to overcome this contradiction, it introduces additional components that will lead to unexpected insertion loss, resulting in reduced cavity quality. Here we propose a Fabry-Perot optomechanical cavity composed of an ultrathin suspended Si₃N₄ metasurface and a fixed Bragg grating mirror, with a measured finesse up to 1100. Transmission loss of this cavity is very low as the reflectivity of this suspended metasurface tends to unity around 1550 nm. Meanwhile, the metasurface has a millimeter-scale transverse dimension and a thickness of only 110 nm, which guarantees a sensitive mechanical response and low cavity diffraction loss. Our metasurface-based high-finesse optomechanical cavity has a compact structure, which facilitates the development of quantum and integrated optomechanical devices.