Active optical modulation of quasi-BICs in Si-VO₂ hybrid metasurfaces

Active optical modulation breaks the limitation of a passive device, providing a new, to the best of our knowledge, alternative to achieve high-performance optical devices. The phase-change material vanadium dioxide (VO₂) plays an important role in the active device due to its unique reversible phase transition. In this work, we numerically investigate the optical modulation in resonant Si-VO₂ hybrid metasurfaces. The optical bound states in the continuum (BICs) in an Si dimer nanobar metasurface are studied. The quasi-BICs resonator with high quality factor (Q-factor) can be excited by rotating one of the dimer nanobars. The multipole response and near-field distribution confirm that magnetic dipoles dominate this resonance. Moreover, a dynamically tunable optical resonance is achieved by integrating a VO₂ thin film to this quasi-BICs Si nanostructure. With the increase of temperature, VO₂ gradually changes from the dielectric state to metal state, and the optical response exhibits a significant change. Then, the modulation of the transmission spectrum is calculated. Situations where VO₂ is located in different positions are also discussed. A relative transmission modulation of 180% is achieved. These results fully confirm that the VO₂ film shows an excellent ability to modulate the quasi-BICs resonator. Our work provides a route for the active modulation of resonant optical devices.