Optical Tomography of Polymeric Microsphere Layers Using Confocal Raman Microscopy.

Alina Syring1,2, Zunhao Wang3, Stefan Wundrack3

  • 1Institut für Halbleitertechnik, Technische Universität Braunschweig, Braunschweig, Germany.

Summary

Confocal Raman microscopy depth profiling is affected by sample size and surroundings. This study introduces a correction factor to improve the accuracy of 3D object dimension measurements from these profiles.