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PZT Composite Film Preparation and Characterization Using a Method of Sol-Gel and Electrohydrodynamic Jet Printing
Yan Cui1, Hao Yu1, Zeshan Abbas2
1Key Laboratory of Precision and Special Processing of Ministry of Education, Dalian University of Technology, Dalian 116024, China.
Micromachines
|May 27, 2023
Summary
A new hybrid method combining sol-gel and electrohydrodynamic jet (E-jet) printing creates superior lead zircon titanate (PZT) composite films. These films exhibit enhanced piezoelectric and dielectric properties with reduced defects, ideal for micro-nano devices.
Area of Science:
- Materials Science
- Nanotechnology
- Ceramic Engineering
Background:
- Lead zircon titanate (PZT) is a crucial material for piezoelectric applications.
- Existing fabrication methods for PZT films often face challenges with defect control and property optimization.
- Developing advanced PZT composite films is essential for next-generation micro-nano devices.
Purpose of the Study:
- To develop a novel hybrid fabrication method for PZT composite films.
- To investigate the structural and electrical properties of the fabricated PZT composite films.
- To demonstrate the advantages of the hybrid method over conventional techniques.
Main Methods:
- A hybrid approach combining sol-gel and electrohydrodynamic jet (E-jet) printing was employed.
- PZT thin films were prepared using the sol-gel method on Ti/Pt electrodes.
- PZT thick films were subsequently printed onto the thin films using E-jet printing to form composite structures.
Main Results:
- PZT composite films exhibited fewer micro-pore defects compared to single E-jet printed films.
- Improved bonding with electrodes and higher preferred crystal orientation were observed.
- Significantly enhanced piezoelectric properties (max 69.4 pC/N), dielectric properties (max 827), and reduced leakage current (1.5 × 10-6A at 200V) were achieved.
Conclusions:
- The hybrid sol-gel and E-jet printing method offers a viable route for fabricating high-performance PZT composite films.
- This method overcomes limitations of single-step processes, leading to improved material quality and device performance.
- The developed PZT composite films are highly suitable for applications in micro-nano devices.

