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Neutron Radiography and Computed Tomography of Biological Systems at the Oak Ridge National Laboratory's High Flux Isotope Reactor
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A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging.

Roberto Mendicino1, Gian-Franco Dalla Betta2,3

  • 1Center for Sensing Solutions, Eurac Research, Via A. Volta 13A, 39100 Bolzano, Italy.

Micromachines
|May 27, 2023
PubMed
Summary

This study introduces a novel monolithic 3D pixel sensor for thermal neutron detection and imaging. Its unique design achieves high efficiency and validates the sensor

Keywords:
front-endmicrostructured sensorsmonolithic sensorssolid-state detectorsthermal neutron detectors

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Area of Science:

  • Semiconductor Physics
  • Particle Detection Technology
  • Radiation Imaging

Background:

  • Traditional neutron detectors often lack high spatial resolution.
  • Monolithic 3D integration offers potential for advanced sensor architectures.
  • Developing efficient thermal neutron detection with CMOS technology is an ongoing challenge.

Purpose of the Study:

  • To present the first monolithic 3D pixel sensor for thermal neutron detection and imaging.
  • To achieve high spatial granularity and neutron detection efficiency.
  • To validate the sensor design through experimental characterization.

Main Methods:

  • Utilizing CMOS SOIPIX technology with Deep Reactive-Ion Etching for microstructured backside cavities.
  • Employing Geant4 simulations to estimate neutron detection efficiency with 10B converters.
  • Conducting functional tests with alpha particles on a 25x25 pixel prototype.

Main Results:

  • Demonstrated a monolithic 3D sensor with 35 × 40 μm² pixel granularity.
  • Simulations predict up to 30% neutron detection efficiency with a 10B converter.
  • Experimental tests with alpha particles validated the sensor's design and functionality.

Conclusions:

  • The developed monolithic 3D pixel sensor is a significant advancement for thermal neutron detection.
  • The sensor architecture enables high spatial resolution, energy discrimination, and charge sharing.
  • This technology holds promise for future applications in neutron imaging and scientific research.