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Si Photonics FMCW LiDAR Chip with Solid-State Beam Steering by Interleaved Coaxial Optical Phased Array
Yufang Lei1,2, Lingxuan Zhang1,2, Zhiyuan Yu1
1State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China.
Micromachines
|May 27, 2023
Summary
This study demonstrates a compact, solid-state Frequency-Modulated Continuous-Wave (FMCW) LiDAR chip using silicon photonics. This on-chip solution offers a low-cost, high-performance alternative to traditional LiDAR systems.
Area of Science:
- Photonics
- Optical Engineering
- Sensor Technology
Background:
- Traditional LiDAR systems are bulky, expensive, and complex due to discrete components.
- Photonic integration offers a path towards miniaturized, cost-effective LiDAR solutions.
Purpose of the Study:
- To propose and demonstrate a solid-state Frequency-Modulated Continuous-Wave (FMCW) LiDAR system on a silicon photonic chip.
- To achieve high integration, compact dimensions, and low cost for LiDAR applications.
Main Methods:
- Design and fabrication of a 32-channel transmitter-receiver interleaved coaxial all-solid-state FMCW LiDAR chip.
- Utilizing optical phased arrays (OPAs) for solid-state scanning without mechanical parts.
- Leveraging a CMOS-compatible silicon photonics platform for fabrication.
Main Results:
- Demonstrated a solid-state FMCW LiDAR chip with integrated optical phased array antennas.
- Achieved a beam width of 0.4° × 0.8° and a grating lobe suppression ratio of 6 dB.
- Successfully performed preliminary FMCW ranging of multiple targets scanned by the OPA.
Conclusions:
- The developed silicon photonic chip enables low-cost, on-chip solid-state FMCW LiDAR.
- The integrated OPA technology facilitates mechanical-free scanning for compact LiDAR systems.
- This technology provides a viable pathway for the commercialization of advanced LiDAR solutions.

