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A High-Sensitivity MEMS Accelerometer Using a Sc0.8Al0.2N-Based Four Beam Structure.

Zhenghu Zhang1, Linwei Zhang2, Zhipeng Wu2

  • 1School of Microelectronics, Shanghai University, Shanghai 201800, China.

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|May 27, 2023
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Summary

This study introduces a high-sensitivity microelectromechanical system (MEMS) piezoelectric accelerometer using Scandium-doped Aluminum Nitride (ScAlN) thin film. The novel design achieves enhanced performance for detecting low-frequency vibrations.

Keywords:
MEMSScAlNpiezoelectric accelerometerssensitivity

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Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Electrical Engineering

Background:

  • Microelectromechanical systems (MEMS) are crucial for inertial sensing.
  • Piezoelectric materials offer high sensitivity for MEMS accelerometers.
  • Improving the performance of MEMS accelerometers is an ongoing research area.

Purpose of the Study:

  • To propose and demonstrate a high-sensitivity MEMS piezoelectric accelerometer.
  • To investigate the use of Scandium-doped Aluminum Nitride (ScAlN) thin film for enhanced performance.
  • To analyze the structural and electrical design for improved sensitivity and linearity.

Main Methods:

  • Fabrication of a MEMS accelerometer with a silicon proof mass and ScAlN piezoelectric cantilever beams.
  • Measurement of the transverse piezoelectric coefficient (d31) of ScAlN using the cantilever beam method.
  • Theoretical analysis and finite element modeling of the device structure.
  • Experimental characterization of the fabricated accelerometer's resonant frequency, operating frequency, sensitivity, and linearity.

Main Results:

  • The ScAlN film exhibits a transverse piezoelectric coefficient (d31) of -4.7661 pC/N, 2-3 times higher than pure AlN.
  • The accelerometer achieves a sensitivity of 2.448 mV/g at 480 Hz.
  • Minimum detectable acceleration and resolution are 1 mg.
  • The device shows good linearity for accelerations below 2 g.

Conclusions:

  • The proposed ScAlN-based MEMS piezoelectric accelerometer demonstrates high sensitivity and linearity.
  • The design, utilizing ScAlN and series-connected electrodes, is effective for low-frequency vibration detection.
  • This technology is suitable for applications requiring accurate measurement of subtle accelerations.