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Large-Scale Moth-Eye-Structured Roll Mold Fabrication Using Sputtered Glassy Carbon Layer and Transferred Moth-Eye

Kazuhiro Kato1, Hiroyuki Sugawara1, Jun Taniguchi2

  • 1Geomatec Co., Ltd., Yokohama Landmark Tower, 9th Floor, 2-2-1 Minato Mirai, Nishi-ku, Yokohama 231-0022, Japan.

Nanomaterials (Basel, Switzerland)
|May 27, 2023
PubMed
Summary

A new sputtering method creates durable glassy carbon moth-eye molds for mass-producing antireflection films. This advanced technique improves upon traditional methods, offering superior anti-reflection and water-repellent properties for applications like window glass.

Keywords:
antireflectionglassy carbonmoth-eye structurenanoimprint lithographyoxygen plasmaporous aluminaroll-to-rollthin film

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Surface Engineering

Background:

  • High demand exists for mass-producible antireflection films with moth-eye structures.
  • Conventional methods using porous alumina for roll-to-roll (RTR) ultraviolet nanoimprint lithography (UV-NIL) are complex and time-consuming.
  • Developing efficient manufacturing technologies for antireflection films is crucial.

Purpose of the Study:

  • To propose and validate a novel sputtering process for fabricating moth-eye structure roll molds.
  • To compare the performance and productivity of glassy carbon (GC) molds against traditional alumina molds.
  • To demonstrate the application of GC moth-eye films for enhanced optical and surface properties.

Main Methods:

  • Fabrication of a thin film of glassy carbon on a roll substrate via sputtering.
  • Creation of the moth-eye structure on the GC roll mold using oxygen plasma irradiation.
  • Production of moth-eye structured films using RTR UV-NIL with the developed GC mold.

Main Results:

  • A large-area (1560 mm) GC moth-eye structure roll mold with uniform reflectance (<0.1%) was successfully fabricated.
  • Superhydrophobic moth-eye structured films with 0.1% reflectance were produced using the GC mold.
  • The GC moth-eye roll mold demonstrated superior antireflection, water repellency, and productivity compared to alumina.

Conclusions:

  • The proposed sputtering and plasma irradiation method offers a highly productive route for manufacturing GC moth-eye structure roll molds.
  • GC moth-eye structured films exhibit excellent antireflection and superhydrophobic properties, suitable for window glass applications.
  • This technology advances the mass production of functional antireflection and water-repellent films.