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Programmable Nanoscale Crack Lithography for Multiscale PMMA Patterns.

Zhiwen Shu1,2, Fuhua Ye1, Peng Liu3

  • 1National Research Center for High-Efficiency Grinding, College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, P. R. China.

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Summary
This summary is machine-generated.

This study introduces a programmable, angle-dependent electron-beam lithography technique for precise nanoscale crack patterning. This method enables high-resolution, large-area microstructured material fabrication with potential applications in information security.

Keywords:
crack lithographyelectron beam lithographynanoscalephysical unclonable functionsecond-order cracks

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Lithography

Background:

  • Traditional lithography often views cracks as defects.
  • Existing methods lack sufficient control over nanoscale crack patterning.
  • Microstructured materials are crucial for various technological applications.

Purpose of the Study:

  • To develop a programmable technique for controlled nanoscale crack generation.
  • To expand the capabilities of electron-beam lithography for large-area patterning.
  • To explore the applications of controlled nanoscale cracks in information security.

Main Methods:

  • Utilized standard electron-beam lithography.
  • Implemented a nanoscale, angle-dependent approach to control crack formation.
  • Fabricated multiscale patterns on poly(methyl methacrylate) (PMMA).

Main Results:

  • Achieved arbitrary shape, geometric size, and large-area patterns of PMMA.
  • Demonstrated control over nanoscale crack generation through angle-dependent lithography.
  • Observed crack interactions, including suppression and second-order crack formation.

Conclusions:

  • The developed strategy offers programmable nanoscale crack patterning for nanofabrication.
  • This technique significantly expands the processing capacity of electron-beam lithography.
  • Angle-dependent nanoscale cracks show promise for physical unclonable functions and information security.