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Picometer-scale optical vortex interferometer using azimuthal complex spectrum analysis.

Jingtao Dong, Tengda Zhang, Yuzhong Zhang

|June 1, 2023

Summary

This summary is machine-generated.

A new method enhances optical vortex interferometry (OVI) for picometer-scale measurements. This technique accurately measures both uniform surface displacement and non-uniform surface deformation.

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The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry

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Published on: August 12, 2013

Area of Science:

Optical Metrology
Interferometry
Nanoscale Measurement

Background:

Optical vortex interferometers (OVI) offer high-precision measurement capabilities.
Existing demodulation methods may limit OVI's application range and accuracy.
Accurate measurement of surface displacement and deformation is crucial in various scientific and engineering fields.

Purpose of the Study:

To propose and validate a novel interferogram demodulation method for optical vortex interferometry.
To achieve picometer-scale measurement accuracy.
To extend OVI's applicability to axisymmetric non-uniform surface deformation measurement.

Main Methods:

Utilized conjugated p-radial-order Laguerre-Gaussian beams to generate a petal-like interferogram.
Employed a camera with a multi-ring pattern sensor to obtain azimuthal intensity profiles.
Applied azimuthal complex spectrum analysis to retrieve phase shifts from intensity profiles.

Main Results:

Achieved picometer-scale accuracy in interferogram demodulation.
Demonstrated a measurement error of 84 pm for 10 nm displacement.
Showcased a measurement error of 0.359 nm for 100 nm deformation magnitude.

Conclusions:

The proposed azimuthal complex spectrum analysis method enables highly accurate interferogram demodulation for OVI.
The method successfully extends OVI's capability to measure axisymmetric non-uniform surface deformation.
This advancement enhances the utility of OVI in precision metrology.