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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
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Atomistic Simulation of Physical Vapor Deposition of Optical Thin Films

Fedor Vasilievich Grigoriev1,2, Vladimir Borisovich Sulimov1,2

  • 1Research Computing Center, M.V. Lomonosov Moscow State University (MSU), 119991 Moscow, Russia.

Nanomaterials (Basel, Switzerland)
|June 10, 2023
PubMed

Keywords:
Monte Carlomolecular dynamicsoptical coatingssimulation of thin filmsthin film depositionthin film properties

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