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A Temperature-to-Frequency Converter-Based On-Chip Temperature Sensor with an Inaccuracy of +0.65 °C/-0.49 °C
Zicong Xu1, Xuan Zhang2, Sili Chen2
1School of Microelectronics, Shanghai University, Shanghai 201800, China.
Sensors (Basel, Switzerland)
|June 10, 2023
Summary
This study introduces a novel CMOS temperature sensor achieving high accuracy and resolution. It utilizes temperature-frequency conversion for precise measurements across a 0-100 °C range.
Area of Science:
- Integrated Circuits
- Sensor Technology
- Semiconductor Devices
Background:
- Accurate temperature sensing is crucial for various electronic systems.
- Existing sensors often face challenges with accuracy, resolution, and stability.
- CMOS technology offers a scalable platform for developing advanced sensors.
Purpose of the Study:
- To propose and validate a novel temperature sensor based on temperature-frequency conversion.
- To achieve high accuracy and resolution in temperature measurement using 180 nm CMOS technology.
- To minimize the impact of process variations and power supply fluctuations.
Main Methods:
- Design of a temperature sensor incorporating proportional-to-absolute temperature (PTAT) current generation.
- Implementation of two relaxation oscillators (OSC-PTAT and OSC-CON) for temperature-frequency conversion.
- Utilizing bipolar junction transistors (BJTs) as the core temperature sensing element.
- Employing voltage average feedback (VAF) to enhance oscillator frequency stability.
Main Results:
- The sensor operates within a 0-100 °C range with a post-calibration inaccuracy of +0.65 °C/-0.49 °C.
- Achieved a high resolution of 0.003 °C.
- Demonstrated a resolution Figure of Merit (FOM) of 6.7 pJ/K².
- The fabricated sensor occupies an area of 0.059 mm² and consumes 32.9 μW.
Conclusions:
- The proposed CMOS temperature sensor effectively utilizes temperature-frequency conversion for accurate measurements.
- The dual oscillator design and BJT sensing module contribute to high accuracy and resolution.
- The sensor's performance indicates its suitability for applications requiring precise temperature monitoring.
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