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Updated: Jun 25, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Silicon Oxycarbide Coatings Consisting of Defined Bottom-Up-Grown Nanostructures
Georg Robert Johannes Artus1, Davide Bottone1, Stefan Seeger1
1Department of Chemistry, University of Zurich, Winterthurerstrasse 190, Zurich, CH-8057, Switzerland.
Abstract:
Silicon oxycarbide (SiOC) materials have arisen in the past few decades as a promising new class of glasses and glass-ceramics thanks to their advantageous chemical and thermal properties. Many applications, such as ion storage, sensing, filtering, or catalysis, require materials or coatings with high surface area and might benefit from the high thermal stability of SiOC. This work reports the first facile bottom-up approach to textured high surface area SiOC coatings obtained via direct pyrolysis of polysiloxane structures of well-defined shapes, such as nanofilaments or microrods. This work further investigates the thermal behavior of these structures by means of FT-IR, SEM, and EDX up to 1400 °C. The rods shrink in volume by ≈30% while their aspect ratio remains unaffected by pyrolysis until at least 1100 °C. The nano-sized filaments show signs of viscous flow already at a comparably low temperature of 900 °C which is very probably due to the nano-size effect. This might open a way to experimentally study the size-effect on the glass transition temperature of oxide glasses, an experimentally unexplored but very relevant topic. These structures have great potential, for example, as ion storage materials and supports in high temperature catalysis and CO2 conversion.
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