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WMS-based near-infrared on-chip acetylene sensor using polymeric SU8 Archimedean spiral waveguide with Euler S-bend
Huan Zhao1, Chuantao Zheng1, Mingquan Pi1
1State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Summary
This study introduces a novel on-chip acetylene sensor using SU8 polymer waveguides for infrared absorption spectroscopy. The developed device demonstrates significant size reduction and effective gas detection capabilities.
Area of Science:
- Photonics and Optical Engineering
- Chemical Sensing Technologies
- Materials Science for Microfabrication
Background:
- SU8 polymer is a cost-effective material suitable for waveguide fabrication.
- On-chip gas sensing using infrared absorption spectroscopy is an emerging field.
- Previous research has not utilized SU8 for on-chip gas sensing applications.
Purpose of the Study:
- To develop and validate a near-infrared on-chip acetylene (C2H2) sensor using SU8 polymer spiral waveguides.
- To investigate the performance of the sensor based on wavelength modulation spectroscopy (WMS).
- To reduce the overall size of the on-chip sensor system.
Main Methods:
- Fabrication of SU8 polymer spiral waveguides incorporating Euler-S bends and Archimedean spirals.
- Experimental validation of sensor performance using wavelength modulation spectroscopy (WMS) at 1532.83 nm.
- Evaluation of acetylene (C2H2) sensing performance, including limit of detection (LoD), optical power confinement factor (PCF), waveguide loss, and response times.
Main Results:
- Achieved over fifty percent reduction in sensor size using proposed waveguide designs.
- Demonstrated limit of detection (LoD) values of 2197.1 ppm and 425.5 ppm for 7.4 cm and 13 cm waveguides, respectively.
- Experimentally determined optical power confinement factor (PCF) of 0.0172, closely matching simulated values; waveguide loss measured at 3 dB/cm.
Conclusions:
- The SU8 polymer waveguide demonstrates significant potential for high-performance on-chip gas sensing.
- The developed sensor is suitable for near-infrared gas detection applications.
- The integration of SU8 waveguides with WMS offers a promising platform for miniaturized gas sensors.
