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Selective Area Modification of Silicon Surface Wettability by Pulsed UV Laser Irradiation in Liquid Environment
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Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties.

Michael Kovalev1,2, Alena Nastulyavichus1, Ivan Podlesnykh1,3

  • 1Lebedev Physical Institute, 119991 Moscow, Russia.

Materials (Basel, Switzerland)
|June 28, 2023
PubMed
Summary
This summary is machine-generated.

Gold hyperdoped silicon shows potential for near-infrared light absorption, but optimal efficiency remains elusive. Further research into laser-based hyperdoping techniques is needed to improve silicon photodetector performance.

Keywords:
IR spectroscopyRaman microspectroscopyX-ray photoelectron microspectroscopyamorphous Si filmenergy-dispersive X-ray microspectroscopygold impuritylaser hyperdoping

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Area of Science:

  • Materials Science
  • Optoelectronics
  • Nanotechnology

Background:

  • Silicon-based photodetectors are crucial for near-infrared (NIR) light detection.
  • Current NIR silicon photodetectors suffer from low efficiency.
  • Gold (Au) hyperdoping presents a potential route to enhance silicon's NIR absorption.

Purpose of the Study:

  • To investigate laser-based hyperdoping of silicon with gold.
  • To comparatively analyze different laser hyperdoping regimes.
  • To assess the potential of Au-hyperdoped Si for improved NIR photodetectors.

Main Methods:

  • Thin amorphous silicon films were hyperdoped using nanosecond and picosecond lasers with gold.
  • Compositional analysis was performed using energy-dispersion X-ray spectroscopy (EDX).
  • Chemical, structural, and IR spectroscopic characterization employed X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and IR spectroscopy.

Main Results:

  • Demonstrated several promising regimes for laser-based silicon hyperdoping with gold.
  • Characterized the compositional, chemical, structural, and optical properties of the hyperdoped silicon.
  • Observed light absorption in the near-infrared region by Au-hyperdoped Si.

Conclusions:

  • Laser-based hyperdoping offers pathways to enhance silicon's NIR optical properties.
  • The optimal efficiency for impurity-hyperdoped silicon materials has not yet been reached.
  • Further optimization of laser hyperdoping processes is required to realize efficient NIR silicon photodetectors.