Mechanical Response of MEMS Suspended Inductors under Shock Using the Transfer Matrix Method

Area of Science:

• Electrical Engineering
• Mechanical Engineering
• Materials Science

Background:

• Micro-Electro-Mechanical Systems (MEMS) suspended inductors can deform under external forces, degrading electrical performance.
• Traditional analysis of shock load responses often relies on numerical methods like the finite element method (FEM).

Purpose of the Study:

• To investigate the mechanical behavior of MEMS suspended inductors under shock load using an alternative method.
• To accurately determine the dynamic response, maximum displacement, and stress without direct shock simulation.

Main Methods:

• The study employs the multibody system transfer matrix method (MSTMM) for analysis.
• Natural frequencies and mode shapes were calculated, followed by dynamic response determination via modal superposition.
• Theoretical determination of peak response time and location, independent of shock specifics.

Main Results:

• The MSTMM successfully predicted natural frequencies and mode shapes.
• The method accurately determined the time and location of maximum displacement and Von Mises stress.
• Analysis revealed the impact of shock amplitude and frequency on the inductor's response.

Conclusions:

• The multibody system transfer matrix method (MSTMM) provides an accurate and efficient alternative to FEM for analyzing MEMS inductor shock responses.
• This approach enables theoretical prediction of critical mechanical behaviors under dynamic loading.
• The findings contribute to understanding and mitigating deformation-induced performance degradation in MEMS inductors.