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Updated: Jul 25, 2025

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
Published on: March 7, 2018
Weizhong Chen1,2, Zubing Duan2, Hongsheng Zhang1
1College of Electronics Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, China.
A novel Silicon-On-Insulator (SOI) LDMOS transistor achieves ultralow on-resistance using a FIN gate and superjunction trench gate for Bulk Electron Accumulation (BEA). This design significantly reduces specific on-resistance and enhances the figure of merit (FOM) beyond silicon limits.
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