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Non-iterative phase tilt interferometry for the tilt shift calculation and phase extraction.

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    Summary

    A new non-iterative phase tilt interferometry (NIPTI) method accurately calculates tilt shift and extracts phase, solving vibration-induced errors. This technique offers high precision for interferometry, even in challenging environments.

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    Area of Science:

    • Optical Metrology
    • Interferometry
    • Vibration Analysis

    Background:

    • External vibrations commonly induce random tilt-shift errors in interferometric measurements.
    • Accurate phase extraction is crucial for high-precision optical metrology.
    • Existing methods may struggle with dynamic tilt-shift compensation.

    Purpose of the Study:

    • To develop a non-iterative phase tilt interferometry (NIPTI) method.
    • To address and solve the random tilt-shift problem caused by external vibration.
    • To achieve accurate phase extraction and tilt-shift calculation.

    Main Methods:

    • Approximation of higher-order phase terms for linear fitting.
    • Least squares method for accurate tilt-shift estimation without iteration.
    • Application in time-domain phase shift Fizeau interferometry for cavity measurements.

    Main Results:

    • Simulated root mean square error of phase calculation reached 0.0002λ.
    • Experimental phase calculation showed no significant ripple in Fizeau interferometry.
    • Root mean square repeatability of calculated phase achieved 0.0006λ.

    Conclusions:

    • NIPTI provides an efficient and high-precision solution for interferometry under vibration.
    • The method effectively compensates for random tilt-shift errors.
    • NIPTI enhances the reliability and accuracy of phase measurements in dynamic environments.