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Updated: Jul 25, 2025

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Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator
Published on: January 28, 2019
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Femtosecond-laser-based full-field three-dimensional imaging with phase compensation
Optics Express
|June 29, 2023
Summary
This study introduces a phase compensation method for coherence scanning interferometry (CSI). The technique enhances efficiency for fast, wide-area 3D imaging with nanoscale precision.
Area of Science:
- Optical Metrology
- Nanoscale Imaging
- Interferometry
Background:
- Coherence scanning interferometry (CSI) offers 3D imaging with nanoscale precision.
- System efficiency is often limited by acquisition speed constraints.
Purpose of the Study:
- To develop a phase compensation method for femtosecond-laser-based CSI.
- To improve the efficiency and speed of nanoscale profilometry.
Main Methods:
- Implemented a phase compensation technique to reduce the interferometric fringe period.
- Synchronized heterodyne frequency with the femtosecond laser's repetition frequency.
- Utilized femtosecond-laser-based CSI for high-speed scanning.
Main Results:
- Achieved larger sampling intervals, increasing acquisition efficiency.
- Maintained a root-mean-square axial error as low as 2 nm.
- Demonstrated high scanning speeds of 6.44 µm per frame.
Conclusions:
- The proposed method significantly enhances the speed of CSI systems.
- Enables fast and precise nanoscale profilometry over large areas.
- Overcomes limitations in current CSI acquisition systems.
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