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Robust dynamic spectroscopic imaging ellipsometer based on a monolithic polarizing Linnik interferometer.

Gukhyeon Hwang, Inho Choi, Sukhyun Choi

|June 29, 2023

Summary

This summary is machine-generated.

A new dynamic spectroscopic imaging ellipsometer (DSIE) offers enhanced stability for thin film analysis. This robust system utilizes a novel compensation method for accurate 3-D spectroscopic ellipsometric mapping.

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Area of Science:

Optical Metrology
Materials Science
Spectroscopic Ellipsometry

Background:

Dynamic Spectroscopic Imaging Ellipsometry (DSIE) is crucial for material characterization.
Previous DSIE systems suffered from long-term stability issues, limiting large-scale applications.
Accurate 3-D spectroscopic ellipsometric mapping requires robust phase error compensation.

Purpose of the Study:

To develop a robust DSIE system with improved long-term stability.
To introduce and evaluate a global mapping phase error compensation method.
To demonstrate the system's reliability in a general environment with external disturbances.

Main Methods:

Implementation of a monolithic Linnik-type polarizing interferometer.
Integration of an additional compensation channel to enhance stability.
Application of a global mapping phase error compensation technique.
Conducting whole thin film wafer mapping under various environmental disturbances.

Main Results:

The monolithic Linnik-type scheme with a compensation channel significantly improved system stability.
The global mapping phase error compensation method proved effective for accurate 3-D mapping.
The DSIE system demonstrated robustness and reliability in a disturbed environment.

Conclusions:

The developed robust DSIE system overcomes previous stability limitations.
The proposed compensation method enables accurate and reliable large-scale spectroscopic ellipsometric mapping.
This advancement is critical for precise thin film analysis in diverse industrial settings.