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On-chip digital holographic interferometry for measuring wavefront deformation in transparent samples.

Marek Mach, Pavel Psota, Karel Žídek

    Optics Express
    |June 29, 2023
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    This study introduces an on-chip digital holographic interferometer for precise wavefront deformation measurement of transparent materials. This compact system offers comparable accuracy to traditional methods with enhanced simplicity and a large field of view.

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    Area of Science:

    • Optics and Photonics
    • Interferometry
    • Nanofabrication

    Background:

    • Digital holographic interferometry (DHI) is sensitive but often requires complex setups.
    • On-chip optical systems offer miniaturization and integration advantages.
    • Measuring wavefront deformation is crucial for material characterization and optical testing.

    Purpose of the Study:

    • To develop and demonstrate a compact on-chip digital holographic interferometer.
    • To measure wavefront deformation of transparent samples with high spatial resolution.
    • To evaluate the performance and accuracy of the on-chip system.

    Main Methods:

    • A Mach-Zehnder interferometer design was adapted for on-chip integration using a waveguide in the reference arm.
    • The system was fabricated and tested for measuring wavefront deformation.
    • Performance was validated by analyzing model glass samples and lithium niobate structures.

    Main Results:

    • The on-chip digital holographic interferometer successfully measured wavefront deformation.
    • High spatial resolution over a large area was achieved.
    • Accuracy was found to be comparable to conventional Mach-Zehnder and white light interferometers.

    Conclusions:

    • The developed on-chip DHI provides a simple, compact, and accurate method for wavefront deformation measurement.
    • The system offers a large field of view, making it suitable for various transparent sample analyses.
    • This technology advances integrated optical metrology for scientific and industrial applications.