Design of a robust photonic crystal mirror for MEMS VCSELs

Wavelength tunable lasers with narrow dynamic linewidths are essential in many applications, such as optical coherence tomography and LiDAR. In this letter, we present a 2D mirror design that provides large optical bandwidth and high reflection while being stiffer than 1D mirrors. Specifically, we investigate the effect of rounded corners of rectangles as they are transferred from the CAD to the wafer by lithography and etching.