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Single Layer Lift-Off of CSAR62 for Dense Nanostructured Patterns

Hanna Ohlin1, Thomas Frisk1, Ulrich Vogt1

  • 1Department of Applied Physics, Biomedical and X-ray Physics, KTH Royal Institute of Technology, Albanova University Center, 106 91 Stockholm, Sweden.

Micromachines
|July 8, 2023
PubMed

Keywords:
CSAR62X-ray diffractive opticselectron beam lithographylift-offnanofabricationnanostructuressingle layerzone plate

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