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Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer

Guowen Liu1,2, Yu Liu2, Xiao Ma2

  • 1School of Aeronautics and Astronautics, Zhejiang University, Hangzhou 310058, China.

Micromachines
|July 8, 2023
PubMed

Keywords:
MEMS accelerometeranchor zoneresponse signalstress cancellation

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