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Design Example: Capacitance Multiplier Circuit

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Author Spotlight: Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing

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A capacitance sensing method with trans-impedance based readout circuit and adaptive filtering for micro-gyro.

Yinyu Liu¹, Youjun Zeng¹, Yaochang Li²

¹Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China.

The Review of Scientific Instruments

|July 10, 2023

Summary

This study analyzes trans-impedance amplifier (TIA) circuits for micro-machined gyroscopes, detailing noise and capacitance-voltage (C-V) gain. An adaptive filter significantly enhances signal-to-noise ratio (SNR) for improved gyroscope performance.

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Area of Science:

Electrical Engineering
Sensor Technology
Micro-electromechanical Systems (MEMS)

Background:

Trans-impedance amplifier (TIA) circuits offer a simple yet high-performance readout solution for micro-machined gyroscopes.
Understanding the noise and capacitance-voltage (C-V) gain characteristics of TIA circuits is crucial for optimizing sensor performance.

Purpose of the Study:

To analyze the noise and C-V gain of TIA circuits for micro-machined gyroscope applications.
To design and evaluate a TIA-based readout circuit with enhanced signal-to-noise ratio (SNR).

Main Methods:

Detailed analysis of TIA circuit noise and C-V gain.
Design and experimental testing of a TIA-based readout circuit with a C-V gain of approximately 286 dB.
Implementation of an adaptive finite impulse response (FIR) filter to improve SNR.

Main Results:

T-network TIA configurations were found to exhibit poor noise performance and should be avoided.
A signal-to-noise ratio (SNR) limit was identified for TIA-based readout circuits, necessitating filtering for improvement.
The designed circuit achieved an SNR of 22.8 dB for a 200 aF variable capacitance, increasing to 47 dB with adaptive filtering.
A capacitive sensing resolution of 0.9 aF was achieved.

Conclusions:

TIA circuits are suitable for micro-machined gyroscope readout, but careful design is needed to mitigate noise.
Adaptive filtering is essential for maximizing the SNR and achieving high-resolution capacitive sensing.
The proposed TIA and adaptive filtering solution offers a promising approach for advanced gyroscope systems.