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Updated: Jul 23, 2025

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Julian Schwarz1, Michael Niebauer1, Maria Koleśnik-Gray2
1Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Electron Devices, Cauerstraße 6, 91058, Erlangen, Germany.
Accurately measuring the thickness of Van der Waals materials is crucial for their electronic applications. This study introduces a new optical reflectance method for precise, nondestructive thickness determination, even for encapsulated layers.
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