Enhancing projection based iterative learning control: A set-membership approach
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Updated: Jul 22, 2025

A Structured Rehabilitation Protocol for Improved Multifunctional Prosthetic Control: A Case Study
Published on: November 6, 2015
Li Li1, Hongyang Zhao1, Fazhi Song1
1Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China; Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China.
Abstract:
Lithographic machine tools require both high motion accuracy and high motion flexibility. Projection based iterative learning control (P-ILC) is appealing for wafer stages to achieve two goals, simultaneously. P-ILC contains a nonparametric feedforward controller based on ILC, and a parametric feedforward controller with a projection step for feedforward tuning. In this paper, a set-membership based frequency-domain ILC algorithm (SM-F-ILC) is employed in the enhancing P-ILC scheme to improve the performance in the nonparametric feedforward control mode. SM-F-ILC can effectively compensate for repetitive errors, attenuate the nonrepetitive error accumulation and achieve fast convergence speed with model uncertainties. These superiorities also facilitate to improve the performance of P-ILC in the parametric feedforward control mode. The validity of the enhancing P-ILC scheme is demonstrated by experimental results.
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