Nanosecond pulsed CMOS LED for all-silicon time-of-flight ranging

Light detection and ranging (LIDAR) is a widely used technique for measuring distance. With recent advancements in integrated photonics, there is a growing interest in miniaturizing LIDAR systems through on-chip photonic devices, but a LIDAR light source compatible with current integrated circuit technology remains elusive. In this letter, we report a pulsed CMOS LED based on native Si, which spectrally overlaps with Si detectors' responsivity and can produce optical pulses as short as 1.6 ns. A LIDAR prototype is built by incorporating this LED and a Si single-photon avalanche diode (SPAD). By utilizing time-correlated single-photon counting (TCSPC) to measure the time-of-flight (ToF) of reflected optical pulses, our LIDAR successfully estimated the distance of targets located approximately 30 cm away with sub-centimeter resolution, approaching the Cramér-Rao lower bound set by the pulse width and instrument jitter. Additionally, our LIDAR is capable of generating depth images of natural targets. This all-Si LIDAR demonstrates the feasibility of integrated distance sensors on a single photonic chip.