Terahertz bandpass filter with Babinet complementary metamaterial mirrors and silicon subwavelength structure

We fabricated a rigid bandpass filter with a broad far-infrared wavelength range of high transmission using a silicon subwavelength structure with a Babinet complementary metamaterial half-mirror pair, despite its apparent light-blocking structure. The rigid one-piece filter was produced by a simple process involving photolithography, dry etching, and deposition, each performed only once. The transmission principle relies on the Fabry-Perot resonance with a metamaterial half-mirror pair that exhibits extraordinary optical transmission due to spoof surface plasmon polaritons. The transmission center wavelength was successfully predicted by the basic equation of Fabry-Perot resonance with an effective medium approximation. In contrast, a narrower bandwidth and a lower minimum transmittance than those predicted from the basic equation were provided by the subwavelength Si structure between the metamaterial mirrors, resulting in enhanced bandpass filter characteristics.