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Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a

Hao Hong1,2, Jiangtao Wei2, Xin Lei3

  • 1Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands.

Microsystems & Nanoengineering
|July 28, 2023
PubMed

Keywords:
Nanopores

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