Granular metals with SiNxdielectrics.

Simeon J Gilbert1, Melissa L Meyerson1, Paul G Kotula1

  • 1Sandia National Laboratories, Albuquerque, NM 87185, United States of America.

Nanotechnology
|July 28, 2023
PubMed
Summary

Granular metal interfaces are critical for electronics. Using silicon nitride (SiN) instead of oxides with molybdenum (Mo) reduces unwanted reactions, enabling new nanostructures for optics and sensing.

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