Phase-Locked Synthetic Wavelength Interferometer Using a Femtosecond Laser for Absolute Distance Measurement without...

We present a phase-locked synthetic wavelength interferometer that enables a complete elimination of cyclic errors in absolute distance measurements. With this method, the phase difference between the reference and measurement paths is fed back into a phase lock-in system, which is then used to control the synthetic wavelength and set the phase difference to zero using an external cavity acousto-optic modulator. We validated the cyclic error removal of the proposed phase-locked method by comparing it with the conventional phase-measuring method of the synthetic wavelength interferometer. By analyzing the locked error signal, we achieved a precision of 0.6 mrad in phase without any observed cyclic errors.