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Fabry-Perot Interferometer Used to Measure Very Low Static Pressure Measurements

Sergio Calixto1, Roberto Zitzumbo2, Zacarías Malacara Hernandez1

  • 1Centro de Investigaciones en Óptica, Loma del Bosque 115, Leon 37150, Mexico.

Sensors (Basel, Switzerland)
|July 29, 2023
PubMed

Keywords:
Fabry–Perot interferometerhigh sensitivityoptical sensorphysical sensorpolydimethyl siloxanepressure sensorsensor devicesvery low pressure measurements

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