High-quality TEM specimen preparation for lithium-ion conducting solid electrolytes by low-energy ion milling

Focused ion beam (FIB) is a widely used method to prepare transmission electron microscopy (TEM) specimen from bulk materials. However, the surface amorphous layer induced by ion beam is an obstacle to obtain high-quality atomic-scale images for quantitative analysis, especially for the analysis of light elements such as lithium in lithium-ion conducting solid electrolytes. Here, taking lithium-ion conducting solid electrolyte materials as an example, the advantages and disadvantages of applying low-energy Ar⁺ ion for fine milling after FIB are investigated. Combining Monte-Carlo simulations with ion milling experiments, the milling parameters are evaluated and discussed in detail. With optimized parameters, TEM specimens with less beam damage and thinner amorphous layer were prepared, enabling the acquisition of high-quality atomic-scale images. Furthermore, low-energy Ar⁺ ion milling is also able to remove hydrocarbon contamination formed during the electron beam illumination inside the microscope, making the contaminated TEM specimens reusable.