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High density lithium niobate photonic integrated circuits.

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Diamond-like carbon (DLC) enables superior fabrication of photonic integrated circuits using lithium niobate (LiNbO3). This advanced manufacturing approach yields low-loss waveguides and high-density integration for efficient electro-optical devices.

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Area of Science:

  • Materials Science
  • Photonics
  • Electrical Engineering

Background:

  • Photonic integrated circuits (PICs) offer advantages over bulk optics but face manufacturing challenges with materials like lithium niobate (LiNbO3).
  • LiNbO3 exhibits a strong Pockels effect, crucial for electro-optic applications, yet is difficult to pattern using conventional dry etching techniques.

Purpose of the Study:

  • To investigate diamond-like carbon (DLC) as a superior hard mask material for fabricating LiNbO3-based photonic integrated circuits.
  • To demonstrate improved waveguide performance, higher integration density, and efficient electro-optic modulation using DLC-based fabrication.

Main Methods:

  • Utilized DLC as a hard mask for deep etching of LiNbO3 photonic integrated circuits.
  • Fabricated deeply etched, tightly confining, low-loss waveguides.
  • Integrated III-V materials with LiNbO3 for laser demonstration.
  • Fabricated Mach-Zehnder Modulator (MZM) devices.

Main Results:

  • Achieved waveguides with propagation losses as low as 4 dB/m.
  • Demonstrated over an order of magnitude higher area integration density compared to ridge waveguides.
  • Showcased a III-V/LiNbO3 laser with sub-kHz intrinsic linewidth and a tuning rate of 0.7 PHz/s.
  • Fabricated an MZM modulator with a length of 1.73 cm and a halfwave voltage of 1.94 V.

Conclusions:

  • Diamond-like carbon is a highly effective material for advanced manufacturing of LiNbO3 photonic integrated circuits.
  • The DLC hard mask approach enables high-performance, densely integrated photonic devices with efficient electro-optic modulation.
  • This method provides a viable route for next-generation photonic devices, including lasers and modulators, with CMOS-compatible driving voltages.