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Updated: Jul 19, 2025

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
Nam Thanh Trung Vu1, Leyi Loh1,2, Yuan Chen3
1Physics Department, National University of Singapore, Singapore 117551, Singapore.
This study introduces conductive atomic force microscopy for rapid, high-contrast imaging of single atomic impurities in 2D semiconductors. This technique enables precise defect identification crucial for advanced semiconductor development.
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Published on: May 28, 2016
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Published on: January 19, 2018
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