Fabrication of Highly Sensitive Capacitive Pressure Sensors Using a Bubble-Popping PDMS

Attempts have been made to introduce microstructures or wrinkles into the elastomer surface to increase the sensitivity of the elastomer. However, the disadvantage of this method is that when a force is applied to the pressure sensor, the contact area with the electrode is changed and the linear response characteristic of the pressure sensor is reduced. The biggest advantage of the capacitive pressure sensor using an elastomer is that it is a characteristic that changes linearly according to the change in pressure, so it is not suitable to introduce microstructures or wrinkles into the elastomer surface. A method of increasing the sensitivity of the capacitive pressure sensor while maintaining the linearity according to the pressure change is proposed. We proposed a bubble-popping PDMS by creating pores inside the elastomer. The sensitivity of the pressure sensor made of the bubble-popping PDMS was approximately 4.6 times better than that of the pressure sensor without pores, and the pressure sensor made of the bubble-popping PDMS showed a high linear response characteristic to the external pressure change. These results show that our pressure sensor can be used to detect applied pressures or contact forces of e-skins.