High-resolution 3D nanoprinting based on two-step absorption via an integrated fiber-coupled laser diode

Area of Science:

• Materials Science
• Nanotechnology
• Optics

Background:

• High-resolution, low-cost 3D laser nanoprinting is crucial for fabricating complex nanostructures.
• Existing methods often face limitations in resolution, cost, or ease of implementation.

Purpose of the Study:

• To develop an easy-to-build 3D laser nanoprinting system utilizing two-step absorption.
• To achieve high-resolution fabrication of 2D and 3D nanostructures using continuous wave (cw) lasers.

Main Methods:

• Utilized a 405-nm fiber-coupled cw laser diode for initiating two-step absorption polymerization.
• Employed a benzil initiator enabling a secondary 532-nm cw laser for enhanced polymerization.
• Fabricated 2D gratings and 3D woodpile nanostructures.

Main Results:

• Achieved sub-150-nm period 2D gratings and 350-nm lateral period 3D woodpile nanostructures at low speed.
• Demonstrated sub-200-nm resolution and sub-50-nm linewidth 2D gratings at 1000 µm/s scan velocity with <1 mW laser power.
• Showcased sub-100-nm feature size enhancement using the secondary laser for polymerization.

Conclusions:

• The developed system offers an accessible and cost-effective approach to 3D laser nanoprinting.
• The two-step absorption mechanism allows for high-resolution fabrication and potential for parallel-writing applications.
• This technique holds promise for advancing high-speed, high-resolution parallel-writing and in situ manipulation in nanotechnology.