Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection.

Area of Science:

• Mechanical Engineering
• Sensor Technology
• Materials Science

Background:

• Projectile fuze overload signals can be unreliable during high-speed intrusion, impacting detonation accuracy.
• Existing sensors may struggle with signal identification in complex impact environments.

Purpose of the Study:

• To develop and validate a novel capacitive acceleration sensor for detecting projectile overload signals.
• To ensure reliable signal identification for accurate projectile layer detonation.

Main Methods:

• A three-pole plate dual-capacitance acceleration sensor was designed and fabricated based on capacitive sensing principles.
• Modal simulation (COMSOL 6.1) and mechanical impact analysis (ANSYS/LS-DYNA) were performed.
• The sensor's performance was tested under various overload conditions using a Machette's hammer test.

Main Results:

• The fabricated ceramic capacitive sensor demonstrated a reasonable structure and reliable vibration signal reception.
• The sensor exhibited self-powered output, high output voltage amplitude, and low spurious interference.
• Numerical simulations accurately modeled projectile intrusion and sensor response under different overloads.

Conclusions:

• The developed capacitive acceleration sensor effectively addresses the challenge of identifying fuze overload signals in high-speed projectile intrusions.
• The sensor shows significant potential for engineering applications in intrusion meter layers, enhancing projectile safety and effectiveness.