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Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer
Guowen Liu1,2, Yu Liu2, Zhaohan Li2
1School of Aeronautics and Astronautics, Zhejiang University, Hangzhou 310058, China.
Micromachines
|August 26, 2023
Summary
This study introduces a closed-loop Micro-Electro-Mechanical Systems (MEMS) accelerometer. A novel compensation method significantly enhances accelerometer performance and stability across wide temperature ranges.
Area of Science:
- Instrumentation and Measurement
- Micro-Electro-Mechanical Systems (MEMS)
- Sensor Technology
Background:
- MEMS accelerometers are crucial for acceleration measurement.
- Performance limitations include zero bias and scale factor drift, especially over temperature variations.
- Existing compensation methods may not fully address these challenges.
Purpose of the Study:
- To describe a closed-loop detection MEMS accelerometer.
- To analyze the working principles and performance dependencies of MEMS accelerometers.
- To develop and validate a combined compensation method for improved performance and stability.
Main Methods:
- Detailed analysis of MEMS accelerometer working principles.
- Investigation of the relationship between zero bias, scale factor, and voltage reference.
- Implementation of a combined compensation strategy using reference voltage source and terminal temperature compensation.
Main Results:
- Reference voltage source compensation reduced the initial range from 3679 ppm to 221 ppm.
- Zero-bias stability increased by 14.3% and scale factor stability by 88.2% on average after initial compensation.
- Combined compensation reduced zero-bias stability to 40 μg and scale factor stability to 16 ppm in one device, with average improvements of 97.96% and 98.90% respectively.
Conclusions:
- The developed combined compensation method effectively improves MEMS accelerometer performance over wide temperature ranges.
- The approach significantly reduces zero bias and scale factor drift, enhancing measurement accuracy and reliability.
- This work contributes to the advancement of high-performance MEMS accelerometer technology.
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