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Vibrating capacitive electrostatic potential sensor based on a double cantilever tuning fork.

Jiale Pan¹, Zhiyu Wang¹, Suijun Yang¹

¹Institute of Industry and Trade Measurement Technology, China Jiliang University, Xueyuan Street, No. 258, Hangzhou 310018, China.

The Review of Scientific Instruments

|September 8, 2023

Summary

This summary is machine-generated.

A new vibrating capacitive sensor uses dual cantilever tuning fork resonance for precise, non-contact electrostatic potential measurement. This innovative sensor achieves high accuracy and linearity, offering a reliable alternative for potential monitoring.

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Area of Science:

Electrical Engineering
Sensor Technology
Physics

Background:

Non-contact electrostatic potential measurement is crucial in various fields.
Existing methods may face limitations in accuracy or range.
Developing advanced sensors is essential for improved electrostatic potential monitoring.

Purpose of the Study:

To design and fabricate a novel vibrating capacitive sensor for electrostatic potential measurement.
To analyze the electrostatic induction model and non-contact measurement principles.
To enhance sensor performance through simulation and optimization.

Main Methods:

Developed an electrostatic induction model and analyzed measurement principles.
Simulated tuning fork vibration modes to determine mechanical and driving parameters.
Utilized multi-physical field simulation to optimize shield plate parameters for linearity.
Designed a compact calibration device for performance evaluation.

Main Results:

The sensor achieved a measurement range of -10 to 10 kV.
Demonstrated measurement accuracy better than ±3%.
Exhibited excellent linearity of 0.46%.

Conclusions:

The designed vibrating capacitive sensor provides an effective solution for non-contact electrostatic potential measurement.
Optimization using simulation and a shield plate significantly improved sensor linearity.
The sensor's performance metrics offer a viable alternative to existing technologies.