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Adaptive Fuzzy Modal Matching of Capacitive Micromachined Gyro Electrostatic Controlling

Li Cheng1, Ruimin Liu2, Shumin Guo3

  • 1Department of Aeronautical and Aviation Engineering, Hong Kong Polytechnic University, Hong Kong.

Sensors (Basel, Switzerland)
|September 9, 2023
PubMed

Keywords:
capacitive micro-machined gyroelectrostatic controlfeedback controlmodal matchingnumerical simulation

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