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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Phase-based reconstruction optimization method for digital holographic measurement of microstructures.

Chen Wang, Weikang Wang, Jiasi Wei

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    |September 14, 2023
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    Summary

    Digital holography offers noninvasive measurement of microstructures. A new phase-based method optimizes reconstruction distance, significantly improving step-height accuracy in simulations and experiments.

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    Area of Science:

    • Optics and Photonics
    • Metrology
    • Microscopy

    Background:

    • Digital holography provides noninvasive, full-field measurements crucial for microstructures.
    • Reconstruction distance uncertainties cause blur and distortion, limiting accuracy.
    • Accurate characterization of stacked-chip microstructures requires precise metrology.

    Purpose of the Study:

    • To develop a phase-based reconstruction optimization method for digital holography.
    • To enhance the accuracy of measuring stacked-chip microstructures.
    • To overcome limitations of reconstruction distance uncertainty in holographic measurements.

    Main Methods:

    • Proposed a phase-based reconstruction optimization using a phase-evaluation function and surface-characterization model.
    • Implemented sliced numerical reconstruction to obtain phase information within a defined distance range.
    • Optimized reconstruction distance by identifying the focal plane via function extremum.

    Main Results:

    • Simulations demonstrated the effectiveness of the proposed method in reconstruction and characterization.
    • Experimental validation using a standard resolution target showed significant improvements.
    • Achieved 31.16% (simulation) and 34.41% (experiment) improvement in step-height characterization accuracy.

    Conclusions:

    • The phase-based reconstruction optimization method effectively resolves reconstruction distance uncertainties.
    • This approach enhances the accuracy of digital holography for microstructure metrology.
    • The method shows practical applicability for precise measurement of microscale features.