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    This study introduces a novel 5mm AlN-based piezoelectric micro-electromechanical system (MEMS) deformable mirror (DM) with 25 actuators. It demonstrates CMOS-compatible fabrication and effective optical aberration correction, showcasing promising applications.

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    Area of Science:

    • Materials Science
    • Optoelectronics
    • Microelectromechanical Systems (MEMS)

    Background:

    • Deformable mirrors (DMs) are crucial for optical aberration correction in various applications.
    • Piezoelectric materials offer advantages for MEMS device fabrication and actuation.
    • Aluminum Nitride (AlN) is a promising piezoelectric material for advanced MEMS devices.

    Purpose of the Study:

    • To present the first prototype of an AlN-based piezoelectric MEMS continuous membrane deformable mirror.
    • To evaluate the fabrication compatibility, actuation characteristics, and optical performance of the developed DM.
    • To demonstrate the potential of AlN piezoelectric technology for high-performance deformable mirrors.

    Main Methods:

    • Fabrication of a 5mm effective aperture AlN-based piezoelectric MEMS DM with 25 independently controlled actuators.
    • Characterization of actuation properties, including linearity, hysteresis, and superposition.
    • Optical aberration correction validation using surface contour fitting to Zernike polynomials up to the 14th order.

    Main Results:

    • Successful demonstration of CMOS compatible fabrication process for the AlN piezoelectric DM.
    • Achieved bidirectional linear actuation with negligible hysteresis.
    • Validated excellent linear superposition control capability of the actuators.
    • Demonstrated good optical aberration correction performance, correcting up to the 14th order Zernike polynomials.

    Conclusions:

    • The AlN-based piezoelectric MEMS DM prototype exhibits attractive characteristics for optical applications.
    • The technology shows great potential for aberration correction despite a non-optimized device structure.
    • This work paves the way for advanced adaptive optics systems utilizing AlN piezoelectric MEMS technology.