Femtosecond pulse laser-engineered glass flexible structures instrumented with an in-built Bragg grating sensor

The advent of near-infrared femtosecond pulse laser has enabled the highly-resolved manufacturing of micro/nano structures in various materials including glass. In this paper, we make use of an automated femtosecond laser system, so-called Femtoprint, to design a monolithic self-instrumented mechanism that we use for in-built strain sensing. To that aim, a flexible structure is designed and produced from a silica planar substrate. It has a flexural joint in which an optical waveguide and a Bragg grating have been directly inscribed using femtosecond pulse laser. The latter provides a non-destructive and non-intrusive measurement tool. The axial strain sensitivity of the in-built Bragg grating has been experimentally determined to be 1.22 pm/μ ϵ, while its temperature sensitivity is 10.51 pm/°C. The demonstration of such instrumented glass flexible mechanisms paves the way towards a new class of highly integrated sensors suitable for applications at the microscale or in harsh environments.